Mass-Vac, Inc.

North Billerica, MA 1862


About Mass-Vac, Inc.

Founded in 1971, Mass-Vac, Inc. serves New England-based customers in need of vacuum pump support and service.


247 Rangeway Rd.
North Billerica, MA 1862
(978) 667-2393

More Info on Mass-Vac, Inc.

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Founded in 1971, Mass-Vac, Inc. serves New England-based customers in need of vacuum pump support and service. Over the years we have expanded our original services to include new and used vacuum equipment, vacuum pump fluids and vacuum components. We have also developed a complete line of vacuum inlet traps, exhaust traps, and oil filtration systems.


Located in Billerica, Massachusetts, Mass-Vac's original New England clientele is now joined by customers throughout the U.S. and the world. As we continue to expand our reach and enhance the services we offer, our fundamental mission remains to provide our customers with the highest quality, most innovative support in the industry.


Mass-Vac is an active member of SEMI and the American Vacuum Society.

All content from Mass-Vac, Inc.

830 350
Process Equipment

Customizable Inlet Traps

June 4, 2020
MV PosiTrap Vacuum Inlet Traps are made of stainless steel and come in 4 and 8-in. dia. sizes for pumps up to 25 and 50 CFM, respectively, and are positively sealed...
830 350

Vacuum Pump Inlet Traps

Oct. 11, 2019
 MV Vacuum Inlet Traps for Atomic Layer Deposition ALD Processes use replaceable filter elements including stainless steel gauze, micron-rated polypropylene, activated...
830 350
Dust Collection

Stackable Vacuum Trap

March 16, 2019
A high capacity vacuum pump inlet-exhaust trap for collecting the heavy particulates associated with semiconductor manufacturing processes is available from Mass-Vac, Inc. of ...
830 350
Process Equipment

Self-Contained Vacuum

Dec. 3, 2018
Mass-Vac's drying vacuums have clear sumps for easy inspection.
830 350
Process Equipment

Vacuum Degassing Chamber Removes Air, Gas, and Water Vapor

Jan. 16, 2018
Mass-Vac, Inc.'s degassing chamber replaces plastic or glass desiccating chambers.
830 350
Process Equipment

Pump Traps Remove Contaminants

Nov. 3, 2017
Mass-Vac, Inc. offers inlet pumps that have sealings at both ends that eliminate blow-by.
830 350
Hazardous Material Storage

Vacuum Pump Inlet Trap Filters Solvents & Acids

Oct. 20, 2015
MV Multi-Trap Vacuum Pump Inlet Traps maximize uptime for central laboratory vacuum systems by protecting from organic solvents, water vapor, acids, and particulates.They provide...