Fusion F07 Performance-Enhanced FKM for Subfab Exhaust Lines

Fusion F07, a performance-enhanced fluoroelastomer, is specifically crafted to withstand common etch and CVD oxygen/fluorine-based gases in semiconductor processing subfab lines, at temperatures up to 355°F (180°C).

With an expected lifetime of at least 6 months, Fusion F07 lasts longer than standard FKM in subfab vacuum system lines. As a result, the performance-enhanced FKM extends the time between planned maintenance activities. Notably, it provides a better total cost of ownership where applications do not require an FFKM compound.

It can be purchased as a seal assembly or as an individual O-ring. Customers can upgrade to Fusion F07 and experience the benefits of an extended lifetime and reduced operating costs as the seals are form-fit replaceable with other industry standard (KF/ISO flange fittings) seals.

 A blue outer ring allows for easier identification upon installation and replacement. Fusion F07 seals are available in most typical sizes, including KF16, KF25, KF40, KF50, ISO63, ISO80, ISO100, ISO160, and ISO200.

Features:

  • Better plasma performance in Oxygen and Fluorine-based chemistries than standard FKM
  • Better total cost of ownership where application does not call for an FFKM compound
  • Minimum expected lifetime of 6 months
  • Form fit replaceable with other industry standard (KF/ISO) seals
  • Blue outer ring allows for easier identification upon installation and replacement
  • O-rings available individually or as an assembly

Applications/Industries:

  • ISO-KF vacuum fittings, including typical sizes: KF16, KF25, KF40, KF50, ISO63, ISO80, ISO100, ISO160, and ISO200
  • Heated and non-heated lines in vacuum systems

Greene Tweed
Lansdale, PA
Local: (215) 256-9521
Toll free: (800) 220-4733
www.gtweed.com

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