MarSurf3D MS Metrology Platform Combines Three Optical Sensors

Mahr's MarSurf3D MS optical metrology platform measures surfaces in real time down to the sub-nanometer range.
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Sept. 24, 2026
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MarSurf3D MS Metrology Platform Combines Three Optical Sensors

Surface measurement work that spans rough geometry, very low roughness finishes, steep flanks, and layer thickness often requires switching between instruments, each suited to a different surface type. The MarSurf3D MS is an optical metrology platform built around a multisensor measuring head that combines three area-based measuring technologies in one system, delivering real-time 3D surface measurements down to the sub-nanometer range. Users configure a single system to fit their application requirements rather than moving parts between instruments.

Displayed at IMTS 2026

The MarSurf3D MS SX3200 configuration was on display at IMTS 2026 in Chicago.

See more from IMTS 2026 →

The head's LED confocal sensor uses patented multi-pinhole technology for fast image capture with high signal quality, providing repeatability down to the nanometer range on nearly any surface condition. White light interferometry provides vertical resolution in the sub-nanometer range regardless of magnification, suited to measuring precise step heights and very low roughness surfaces. Focus variation with active lighting is designed for measuring the geometry of large, rough surfaces, capturing steeply inclined surfaces up to 86° and large vertical ranges in a single measurement.

The platform is available off the shelf in several axis configurations:

  • The portable MX3050 has 2 x 2 x 1 in (50 x 50 x 35 mm) XYZ axes
  • The compact SX3200 has 8 x 8 x 3 in (200 x 200 x 75 mm) XYZ axes
  • The GS3501 has 20 x 16 x 4 in (500 x 400 x 100 mm) XYZ axes

The system can be used in laboratories, quality assurance environments, or directly on the production floor.

Measurements can be fully automated to increase throughput and reduce operator error. Measurement is material-independent, covering any geometry and surface characteristic, whether reflective, absorbent, opaque, or transparent. A user-guided interface includes automatic modes for all significant measuring parameters and supports measurement protocols for known surfaces. Measurement documentation supports traceability and auditability.

Applications

  • Structured, rough, and smooth surface measurement
  • Step height measurement
  • Steep flank measurement
  • Layer thickness measurement
  • Large height range measurement
  • Production floor surface inspection

Industries

  • Manufacturing
  • Quality Assurance
  • Metrology Laboratories

Who It's For

  • Multiple surface types measured on one system
  • Reflective, transparent, or absorbent materials
  • Sub-nanometer vertical resolution required
  • Steep surfaces up to 86°
  • Automated measurement to reduce operator error
  • Traceable, auditable measurement data

Features:

  • Multisensor head with LED confocal, white light interferometry, and focus variation with active lighting
  • Real-time measurements down to the sub-nanometer range
  • Patented multi-pinhole LED confocal technology
  • Confocal repeatability down to the nanometer range
  • Sub-nanometer vertical resolution regardless of magnification
  • Captures surfaces inclined up to 86°
  • Large vertical ranges captured in a single measurement
  • XYZ axes from 2 x 2 x 1 in (50 x 50 x 35 mm) to 20 x 16 x 4 in (500 x 400 x 100 mm)
  • Portable MX3050, compact SX3200, and GS3501 configurations
  • Fully automatable measurements
  • Material-independent measurement of reflective, absorbent, opaque, and transparent surfaces
  • User-guided interface with automatic modes for all significant parameters
  • Measurement protocols for known surfaces
  • Documentation for traceability and auditability
  • For laboratory, QA, and production floor use

Mahr, Inc.
Providence, RI
(401) 784-3100
[email protected]
mahr.com

Contributors:
This piece was created with the help of generative AI tools and edited by our content team for clarity and accuracy.