SINGLE AXIS MEMS INCLINOMETER SENSOR

April 17, 2010
TURCK introduces a new single axis inclinometer sensor for detecting angular tilt with an adjustable measuring range of 360 degrees. Inclinometer sensors solve unique feedback requirements for applications such as leveling platforms, controlling a dancer or controlling tilt angle in a diverse array of industries. TURCK’s single axis inclinometer sensor measures angular tilt in reference to gravity. To deliver precise measurements, the inclinometer utilizes a MEMS (micro-electro-mechanical system) device that incorporates a micro-electro-mechanical capacitive element into the sensor. The device consists of two parallel plate electrodes, one stationary and one attached to a spring-mass system. As the inclinometer tilts with the attached equipment, its acceleration produces deflection in the non-stationary electrode. The result is a measurable change in the capacitance between the two plates that is proportional to the angle of deflection. These signals have been conditioned to produce a single analog voltage output (0.1 to 4.9 VDC) or current output (4 to 20 mA). The inclinometer’s MEMS technology utilizes a microboard design that ensures high accuracy within a compact, industrialized package. To withstand challenging environments, this robust inclinometer is IP68-rated and offers a wide temperature range of -30 to 70° C.