Semiconductor dry pumps, combustion gas abatement solutions, chambers, extreme ultraviolet lithography (EUVL or EUV), turbomolecular pumps, cryopumps, crychillers, and more.
Edwards Vacuum is a global manufacturer of vacuum and abatement. Its products are integral to manufacturing processes for semiconductors, flat panel displays, LEDs, and solar cells, and are used within a diverse range of industrial processes, including power, glass, coating applications, steel, metallurgy, pharmaceutical, chemical, scientific instruments, and a wide range of R&D applications.
EDWARDS VACUUM has combined its years of comprehensive know-how and innovative technical expertise to develop a revolutionary range of new liquid ring pumps – the ELRi series....
