Controllers Provide Sub-Nanometer Resolution
Supplier: ACS Motion Control Part Number MC4U
Providing sub-nanometer position resolution
without compromising speed or throughput, ACS Motion Control's advanced
SPiiPlus and MC4U multi-axis motion controllers feature a powerful Sin-Cos
encoder multiplier that enables accurate, high-resolution positioning while
reducing jitter and settling times.
The SPiiPlus Sin-Cos encoder multiplier features 1Vptp differential inputs
that use a maximum theoretical Sin-Cos encoder multiplication factor of
65,536 to achieve the required high resolution of today's demanding motion
applications. With input frequencies rated up to 2.5MHz, the achievable
maximum velocity is not dependant on the selected multiplication factor
enabling the use of ultra high-resolution laser feedback devices.
"When high-speed and nanometer axis position resolutions are required, OEMs
have been limited to expensive laser interferometer feedback systems. With
our internal SPiiPlus Sin-Cos encoder multiplier, users now have a much less
expensive alternative by using an analog Sin-Cos encoder solution," said
Evan Reed, ACS Vice President.
The SPiiPlus PCI and linear drives were tested on a high performance XY
table used for wafer inspection with Sin-Cos encoder resolutions of 4nm (250
lines per mm). Using a multiplication factor of 8,192, ACS engineers
measured a jitter of ±2 encoder counts, which is equivalent to ~1nm. At this
high resolution, the axis achieved velocities up to one meter per second.
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